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The Buffer Gas Influence Rate On Absolute Cu Atoms Density With Regard To Deposition
The absolute Cu atoms density in Cu(2S1/22P1/2) ground state has been measured by Resonance Optical Absorption (ROA) technique in a DC magnetron sputtering deposition with argon. We measured these densities under variety of operation conditions: pressure from 0.6 μbar to 14 μbar, input power from 10W to 200W and N2 mixture from 0% to 100%. For measuring the gas temperature, we used the simulation of N2 rotational spectra with a special computer code. The absolute number density of Cu atomsdoi:10.5281/zenodo.1334950 fatcat:vj3mtmfyi5cknmsfsxlmwkqfzq