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Comparison of patterning silicon and silicon carbide using focused ion beam

S.K.P. Veerapandian, Susanne Beuer, Maximilian Rumler, Florian Stumpf, Keith Thomas, L. Pillatsch, Johannes Michler, Lothar Frey, Mathias Rommel
2014

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doi:10.24406/publica-fhg-387002 fatcat:exram5rq3rcbdajf6ld2lpgpza
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S.K.P. Veerapandian, Susanne Beuer, Maximilian Rumler, Florian Stumpf, Keith Thomas, L. Pillatsch, Johannes Michler, Lothar Frey, Mathias Rommel. "Comparison of patterning silicon and silicon carbide using focused ion beam." (2014)