A nanomechanical switch for integration with CMOS logic

David A Czaplewski, Gary A Patrizi, Garth M Kraus, Joel R Wendt, Christopher D Nordquist, Steven L Wolfley, Michael S Baker, Maarten P de Boer
2009 Journal of Micromechanics and Microengineering  
We designed, fabricated and measured the performance of nanoelectromechanical (NEMS) switches. Initial data are reported with one of the switch designs having a measured switching time of 400 ns and an operating voltage of 5 V. The switches operated laterally with unmeasurable leakage current in the 'off' state. Surface micromachining techniques were used to fabricate the switches. All processing was CMOS compatible. A single metal layer, defined by a single mask step, was used as the
more » ... ed as the mechanical switch layer. The details of the modeling, fabrication and testing of the NEMS switches are reported.
doi:10.1088/0960-1317/19/8/085003 fatcat:wgzy3ivpwnbyfgq46ncjxuizmy