Towards superfast 3D optical metrology with digital micromirror device (DMD) platforms

Tyler Bell, Song Zhang, Michael R. Douglass, Philip S. King, Benjamin L. Lee
2014 Emerging Digital Micromirror Device Based Systems and Applications VI  
This paper summarizes our decade-long research efforts towards superfast 3D shape measurement leveraging the digital micromirror device (DMD) platforms. Specifically, we will present the following technologies: (1) high-resolution real-time 3D shape measurement technology that achieves 30 Hz simultaneous 3D shape acquisition, reconstruction and display with more than 300,000 points per frame; (2) Superfast 3D optical metrology technology that achieves 3D measurement at a rate of tens of kHz
more » ... of tens of kHz utilizing the binary defocusing method we invented; and (3) the improvement of the binary defocusing technology for superfast and highaccuracy 3D optical metrology using the DMD platforms. This paper will present both principles and experimental results. © (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only. ABSTRACT This paper summarizes our decade-long research efforts towards superfast 3D shape measurement leveraging the digital micromirror device (DMD) platforms. Specifically, we will present the following technologies: (1) high-resolution realtime 3D shape measurement technology that achieves 30 Hz simultaneous 3D shape acquisition, reconstruction and display with more than 300,000 points per frame; (2) Superfast 3D optical metrology technology that achieves 3D measurement at a rate of tens of kHz utilizing the binary defocusing method we invented; and (3) the improvement of the binary defocusing technology for superfast and high-accuracy 3D optical metrology using the DMD platforms. This paper will present both principles and experimental results. ; phone 1 515 294 0723; fax 1 515 294 3261; www.vrac.iastate.edu/˜song. Downloaded From: http://proceedings.spiedigitallibrary.org/ on 11/06/2014 Terms of Use: http://spiedl.org/terms Proc. of SPIE Vol. 8979 897907-2 Downloaded From: http://proceedings.spiedigitallibrary.org/ on 11/06/2014 Terms of Use: http://spiedl.org/terms Proc. of SPIE Vol. 8979 897907-8 Downloaded From: http://proceedings.spiedigitallibrary.org/ on 11/06/2014 Terms of Use: http://spiedl.org/terms
doi:10.1117/12.2035270 fatcat:e5pmdu3hcbhqvnv6p4au6wwcn4