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Effect of undercut on the resonant behaviour of silicon nitride cantilevers
2009
Journal of Micromechanics and Microengineering
We present a systematic investigation of the dynamic properties of silicon nitride cantilevers in air. The thermal noise spectra of cantilevers have been measured using a home-made optical deflection setup. Torsional and flexural resonances up to the seventh mode are observed. The dependence of resonance frequencies on the dimensions and mode number is studied in detail. It is found that undercut increases the effective length of the cantilever by a value L, which depends on the undercut
doi:10.1088/0960-1317/19/3/035003
fatcat:piz64i2mzjf3dag6tv2v5koo2i