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We present a systematic investigation of the dynamic properties of silicon nitride cantilevers in air. The thermal noise spectra of cantilevers have been measured using a home-made optical deflection setup. Torsional and flexural resonances up to the seventh mode are observed. The dependence of resonance frequencies on the dimensions and mode number is studied in detail. It is found that undercut increases the effective length of the cantilever by a value L, which depends on the undercutdoi:10.1088/0960-1317/19/3/035003 fatcat:piz64i2mzjf3dag6tv2v5koo2i