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Use of the Pseudo-Rigid Body Model to Simplify the Description of Complliant Micro-Mechanisms
1996
1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest
unpublished
This paper reports the use of the pseudo-rigid body method to predict the motion of compliant micro-mechanisms (CMEMS). Physical measurement of the motion of CMEMS structures is compared with predictins of the pseudo-rigid body model and finite element analysis. It is shown that for some structures the computationally simple pseudo-rigid body model can accurately predict the motion of these structures with error of less than the measurement accuracy of 0.5µm for deflections as large as 30µm.
doi:10.31438/trf.hh1996.32
fatcat:nk3ori4psza2hktx65nbygg75a