Effect of alumina coating on the Pull-in Voltage in Electrostatically actuated micro device
알루미나 코팅이 정전기적 구동의 마이크로 소자의 풀 인 전압에 미치는 영향

Hyun-Sik Park
2014 Journal of the Korea Academia-Industrial cooperation Society  
Electrostatically-actuated Micro device have been used widely in a variety of integrated sensors and actuators. Electrostatically-actuated micro devices with a gap of several micrometers or less between the electrodes have shown failure problems by electrostatic adhesion. To improve this adhesion phenomenon, micro devices of varying lengths and widths in electrodes were fabricated, and an alumina coating was then deposited using atomic layer deposition technology. The effects of improving
more » ... of improving adhesion phenomenon were compared by measuring the pull-in voltage before and after the coating process. The pull-in voltage increased with increasing length of the upper electrode after the coating. An increase in the electrode area results in an increase in the pull-in voltage after coating. The alumina coating method applied to improve the adhesion on an electrostatically-actuated micro device was observed as an effective method.
doi:10.5762/kais.2014.15.9.5758 fatcat:62axhyfv4fgxbm3ypkyvqywfpq