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Dynamic Pull-in of Shunt Capacitive MEMS Switches
2009
Procedia Chemistry
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We report experimental results for a capacitive MEMS shunt switch that employs Dynamic Pull-in (V DP = V DC + RMS v ac ) as an actuation method. We show that V DP is significantly less than the static pull-in voltage (V SP = V DC ) traditionally used for actuation. We also show that the reduction in actuation voltage can be enhanced be operating at the nonlinear resonance frequency.
doi:10.1016/j.proche.2009.07.155
fatcat:57pxov2wdrhgvhhgxrz2niaur4