Gettering of transition metals in high-performance multicrystalline silicon by silicon nitride films and phosphorus diffusion

AnYao Liu, Chang Sun, Hang Cheong Sio, Xinyu Zhang, Hao Jin, Daniel Macdonald
2019 Journal of Applied Physics  
doi:10.1063/1.5050566 fatcat:6qhnlcy7efafdjln5vwuk44n4u