Phonon-coupled trap-assisted charge injection in metal-nitride-oxide-silicon/silicon-oxide-nitride-oxide-silicon structures

K. A. Nasyrov, S. S. Shaimeev, V. A. Gritsenko, J. H. Han
2009 Journal of Applied Physics  
A phonon-coupled trap model is proposed for trap-assisted injection mechanism in silicon-oxide-nitride-oxide-silicon ͑SONOS͒/metal-nitride-oxide-silicon ͑MNOS͒ structures at low voltages. On the basis of this model, a theory of charge injection in SONOS/MNOS has been developed. Charge injection experimental data was fitted by this theory. Obtained trap parameters are close to those previously reported ͓K. A. Nasyrov et al., J. Appl. Phys. 96, 4293 ͑2004͔͒, where the current dependence on
more » ... ependence on temperature and electric field was investigated in MNOS.
doi:10.1063/1.3151711 fatcat:o6hzijrsczb27crcrylblzux5e