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A phonon-coupled trap model is proposed for trap-assisted injection mechanism in silicon-oxide-nitride-oxide-silicon ͑SONOS͒/metal-nitride-oxide-silicon ͑MNOS͒ structures at low voltages. On the basis of this model, a theory of charge injection in SONOS/MNOS has been developed. Charge injection experimental data was fitted by this theory. Obtained trap parameters are close to those previously reported ͓K. A. Nasyrov et al., J. Appl. Phys. 96, 4293 ͑2004͔͒, where the current dependence ondoi:10.1063/1.3151711 fatcat:o6hzijrsczb27crcrylblzux5e