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30aPS-38 紫外光照射によるSiのダメージ領域の物性評価(30aPS 領域9ポスターセッション(表面,界面,結晶成長),領域9(表面・界面,結晶成長))
30aPS-38 Analytic study of damaged Si induced by UV pulse light

Y. Miyauchi, H. Sano, K. Higashimine, G. Mizutani
2006 Meeting Abstracts of the Physical Society of Japan (Nihon Butsuri Gakkai koen gaiyoshu)  

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doi:10.11316/jpsgaiyo.61.1.4.0_903_2 fatcat:vrfa34bykzdtln3bcscx5m2kza
lang:ja
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Y. Miyauchi, H. Sano, K. Higashimine, G. Mizutani. "30aPS-38 紫外光照射によるSiのダメージ領域の物性評価(30aPS 領域9ポスターセッション(表面,界面,結晶成長),領域9(表面・界面,結晶成長))." Meeting Abstracts of the Physical Society of Japan (Nihon Butsuri Gakkai koen gaiyoshu) 61.1.4.0 (2006) 903