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Laser plasma x-ray contact microscopy of living specimens using a chemically amplified epoxy resist
1998
Applied Physics Letters
We report on the use of an epoxy based chemically amplified resist, to produce x-ray images of living biological specimens, exposed with laser plasma generated soft x rays, in the water window ͑2.3-4.4 nm͒. The photoresist response was at least two orders of magnitude "faster" than polymethyl methacrylate, the standard resist used so far in soft x-ray contact microscopy. Atomic force and scanning electron microscopy of the biological specimen images, recorded in the resist, clearly showed the
doi:10.1063/1.121616
fatcat:4b2ctvhrxzcpxhepyxqbyer6bq