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Embedding a carbon nanotube across the diameter of a solid state nanopore
2011
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
A fabrication method for positioning and embedding a single-walled carbon nanotube (SWNT) across the diameter of a solid state nanopore is presented. Chemical vapor deposition (CVD) is used to grow SWNTs over arrays of focused ion beam (FIB) milled pores in a thin silicon nitride membrane. This typically yields at least one pore whose diameter is centrally crossed by a SWNT. The final diameter of the FIB pore is adjusted to create a nanopore of any desired diameter by atomic layer deposition
doi:10.1116/1.3628602
fatcat:voo6l2vjbrhppljfv6xwdwkjbe