Embedding a carbon nanotube across the diameter of a solid state nanopore

E. S. Sadki, S. Garaj, D. Vlassarev, J. A. Golovchenko, D. Branton
2011 Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics  
A fabrication method for positioning and embedding a single-walled carbon nanotube (SWNT) across the diameter of a solid state nanopore is presented. Chemical vapor deposition (CVD) is used to grow SWNTs over arrays of focused ion beam (FIB) milled pores in a thin silicon nitride membrane. This typically yields at least one pore whose diameter is centrally crossed by a SWNT. The final diameter of the FIB pore is adjusted to create a nanopore of any desired diameter by atomic layer deposition
more » ... D), simultaneously embedding and insulating the SWNT everywhere but in the region that crosses the diameter of the final nanopore, where it remains pristine and bare. This nanotube-articulated nanopore is an important step towards the realization of a new type of detector for biomolecule sensing and electronic characterization, including DNA sequencing.
doi:10.1116/1.3628602 fatcat:voo6l2vjbrhppljfv6xwdwkjbe