New Double-sided Patterning Process Using a Dilute Hydrochloric Acid Solution to Fabricate Stacked Intrinsic Josephson Junctions Inside Bi2Sr2CaCu2O8+x Single Crystals

Takahiro KATO, Hiroki ISHIDA, Hisayuki SUEMATSU, Kanji YASUI, Katsuyoshi HAMASAKI
2011 TEION KOGAKU (Journal of Cryogenics and Superconductivity Society of Japan)  
Synopsis: We developed a new double-sided patterning (DSP) process using a dilute acid solution (pH=1.65) to fabricate Bi 2 Sr 2 CaCu 2 O 8+x (Bi-2212) stacks of intrinsic Josephson junctions. The stacks, which were fabricated from a single crystal of Bi-2212, were surrounded by an acid-treated product. The critical aspect of this process is that the Bi-2212 surrounding the photoresist pattern was changed to a transparent material, BiOCl, which was connected with the Bi-2212 crystal. As a
more » ... , this process provides an easy way to achieve the DSP of the surface of the Bi-2212 crystal. This new DSP process allows for remarkably improved reproducibility in fabricating the Bi-2212 stacks which show good current-voltage characteristics with large hysteresis and multiple branches at T=77 K.
doi:10.2221/jcsj.46.489 fatcat:pxosoz3urne3pizqpzo4j5mnce