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A Study on Electrochemical Machining Method in Ultrapure Water. Chemical Reaction Process of Si(001) Anode Surface
超純水のみによる電気化学的加工法の研究 陽極Si(001)表面の反応素過程

Hidekazu GOTO, Kikuzi HIROSE, Itsuki KOBATA, Yasushi TOMA, Yuzo MORI
2001 Journal of the Japan Society for Precision Engineering  

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doi:10.2493/jjspe.67.1438 fatcat:utttj525sfbapp3jnl4agjfpua
lang:ja
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Hidekazu GOTO, Kikuzi HIROSE, Itsuki KOBATA, Yasushi TOMA, Yuzo MORI. "A Study on Electrochemical Machining Method in Ultrapure Water. Chemical Reaction Process of Si(001) Anode Surface." Journal of the Japan Society for Precision Engineering 67.9 (2001) 1438-1442