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YBCO thin films have been grown by Metal Organic Chemical Vapour Deposition in ;I cold wall type reactor. The 0-diketonates of yttrium, barium and copper are used as precursors. Filrna have bcen deposited on (001 I MgO and (012) LaA103 single crystalline substrates. The morphology is very dependant on thc gas p h a x composition. Different oxygen partial pressures have been investigated. An increasing oxygen partial prcasul-cat a fixed deposition temperatureis found to increase the growth ratedoi:10.1051/jphyscol:1995543 fatcat:ropy4bc54fbvnlfu4tlb5odybe