Nonmaximally entangled state quantum photolithography

Yan-Hui Wang, Le-Man Kuang
2003 Journal of Optics B-Quantum and Semiclassical Optics  
Many previous works on quantum photolithography are based on maximally-entangled states (MES). In this paper, we generalize the MES quantum photolithography to the case where two light beams share a $N$-photon nonmaximally-entangled state. we investigate the correlations between quantum entanglement and quantum photolithography. It is shown that for nonlocal entanglement between the two light beams the amplitude of the deposition rate can be changed through varying the degree of entanglement
more » ... of entanglement described by an entanglement angle while the resolution remains unchanged, and found that for local entanglement between the two light beams the effective Rayleigh resolution of quantum photolithography can be resonantly enhanced.
doi:10.1088/1464-4266/5/5/005 fatcat:4sudqa5mp5bb3h2dn3nc7t4qjy