A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2015; you can also visit the original URL.
The file type is
Micromachined Devices and Components III
This paper presents a new local refining meshing algorithm which is referred to as the Exposed Face Mesh (EFM) algorithm, for three-dimensional coupled electromechanical analysis with multiple dielectrics. This algorithm allows for the independent refinement of the electrostatic mesh and mechanical mesh in a coupled system. This approach is compared to the commonly used volume refining mesh method in which both the electrostatic and mechanical mesh domains are refined concurrently. The new EFMdoi:10.1117/12.284521 fatcat:tcvip7yuevaalho2gn7srvylea