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Analytics-statistics mixed training and its fitness to semisupervised manufacturing
2019
PLoS ONE
While there have been many studies using machine learning (ML) algorithms to predict process outcomes and device performance in semiconductor manufacturing, the extensively developed technology computer-aided design (TCAD) physical models should play a more significant role in conjunction with ML. While TCAD models have been effective in predicting the trends of experiments, a machine learning statistical model is more capable of predicting the anomalous effects that can be dependent on the
doi:10.1371/journal.pone.0220607
pmid:31408473
pmcid:PMC6692054
fatcat:nby6oi4gnbf4hbqbeuzsubxwj4