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In semiconductor test system, test equipment all have a period of usage. When the test time of equipment is larger than its period of usage, its fault will occur frequently. This paper will use data mining method to predict the next time point of fault based on the history data related to equipment fault. By this, a method of equipment fault prediction will be put forward, and provide the decision support for semiconductor equipment maintenance.doi:10.4028/www.scientific.net/aef.2-3.706 fatcat:qtqksx5aincg3cspa366zgjjjq