SPO mirror plate production and coating

Boris Landgraf, Ljubiša Babic, Nicolas M. Barrière, Alex Bayerle, Luigi Castiglione, Maximilien J. Collon, Noë Eenkhoorn, David Girou, Ramses Günther, Enrico Hauser, Yvette Jenkins, Laurens Keek (+40 others)
2021 Optics for EUV, X-Ray, and Gamma-Ray Astronomy X  
The Silicon Pore Optics (SPO) technology has been established as a new type of X-ray optics enabling future X-ray observatories such as Athena and ARCUS. SPO is being developed at cosine together with the European Space Agency (ESA) and academic as well as industrial partners. The SPO modules are lightweight, yet stiff, high-resolution X-ray optics, allowing missions to reach a large effective area of several square meters. These properties of the optics are mainly linked to the mirror plates
more » ... nsisting of mono-crystalline silicon. Silicon is rigid, has a relatively low density, a very good thermal conductivity and excellent surface finish, both in terms of figure and surface roughness. For Athena, a large number of mirror plates are required, around 150,000 for the qualification model (QM) and flight model (FM) configurations. With the technology spin-in from the semiconductor industry, mass production processes can be employed to manufacture rectangular shaped SPO mirror plates in high quality, large quantity and at low cost. Within the last few years, several aspects of the SPO mirror plates have been reviewed and undergone further developments in terms of effective area, intrinsic behavior of the mirror plates and mass production capability. In view of flight model production, a second plate supplier has been added in addition to the first plate supplier. The paper provides an overview of the most recent plate design, metrology and production developments.
doi:10.1117/12.2594234 fatcat:o456oy56yjcubbpc2hqmnjakvq