Design, Fabrication, Testing and Simulation of a Rotary Double Comb Drives Actuated Microgripper

Nicola Pio Belfiore, Alvise Bagolini, Andrea Rossi, Gabriele Bocchetta, Federica Vurchio, Rocco Crescenzi, Andrea Scorza, Pierluigi Bellutti, Salvatore Andrea Sciuto
2021 Micromachines  
This paper presents the development of a new microgripper actuated by means of rotary-comb drives equipped with two cooperating fingers arrays. The microsystem presents eight CSFH flexures (Conjugate Surface Flexure Hinge) that allow the designer to assign a prescribed motion to the gripping tips. In fact, the adoption of multiple CSFHs gives rise to the possibility of embedding quite a complex mechanical structure and, therefore, increasing the number of design parameters. For the case under
more » ... udy, a double four-bar linkage in a mirroring configuration was adopted. The presented microgripper has been fabricated by using a hard metal mask on a Silicon-on-Insulator (SOI) wafer, subject to DRIE (Deep Reactive Ion Etching) process, with a vapor releasing final stage. Some prototypes have been obtained and then tested in a lab. Finally, the experimental results have been used in order to assess simulation tools that can be used to minimize the amount of expensive equipment in operational environments.
doi:10.3390/mi12101263 pmid:34683314 fatcat:cikb7zzzdjfrvkir7vz5wfrgim