A SLOT ANTENNA-COUPLED MICROBOLOMETER FOR DETECTION AT 94 GHZ

Mohamed Abdel-Rahman, Nageeb Fouad Al-Khalli, Andi Hakim Kusuma, Nacer Amara Debbar
2012 Progress In Electromagnetics Research Letters  
In this paper, we report on the design, fabrication and characterization of a slot antenna on a quarter wavelength silicon (Si) substrate coupled to an uncooled titanium (Ti) microbolometer for detection at 94 GHz. The detector was fabricated using conventional photolithographic and microfabrication techniques. The detector exhibited a voltage responsivity (R v ) of 0.779 V/W, a noise equivalent power (NEP ) of 10.2 nW/ √ Hz, and a time constant (τ ) of 3.88 µsec.
doi:10.2528/pierl12042503 fatcat:m6onuniqszbtxgmxxufybc2tju