Voltage Holding Capability of Large-Size Acceleration Grid with Multiple-Apertures and Multiple-Stage for Negative Ion Source
大型負イオン源における大面積多孔多段電極の真空耐電圧

Atsushi KOJIMA, Masaya HANADA, Takashi INOUE, NB Heating Technology Group, Yasushi YAMANO, Shinichi KOBAYASHI
2013 Journal of the Vacuum Society of Japan  
doi:10.3131/jvsj2.56.502 fatcat:r23eouoccrhk3gsqtohx5ic4wy