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A general analytical method is proposed to transform a 2-D multilayer physical domain with the nonplanar semiconductor surface into a 2-D rectangular mathematical domain with the planar surface, in which a set of Fourier series are used to describe a general conformal mapping for each layer. Based on the proposed method, a simple iteration algorithm, which incorporates a nonlinear Jacobian-iteration method with the fast-Fourier transformation (FFT), is developed to solve a system of nonlineardoi:10.1109/43.240081 fatcat:dir26cyrvzgqbn3z7x32w2thmu