Inclusions in Magnetron Sputtered YBa2Cu3-xMxO7-δThin Films: A Study by Means of Electron Microscopy

Karen Verbist, Gustaaf Van Tendeloo, Min Ye, Jeannot Schroeder, Mohammad Mehbod, Robert Deltour
1996 Microscopy Microanalysis Microstructures  
2014 The microstructure of (001) YBa2CU3O7-03B4 and YBa2Cu3-xMxO7-03B4 (M = Zn or Fe) thin films grown by inverted cylindrical magnetron sputtering was investigated by means of electron microscopy. The imperfections present in the films are discussed. Special attention is paid to nanoscale Y2O3 inclusions. The density of [001] Y2O3 precipitates was studied in YBa2CU3-xZnxO7-03B4 and YBa2Cu3-xFexO7-03B4 thin films prepared under identical conditions. The density decreases for increasing
more » ... increasing Zn-content and is unaffected in case of Fe-substitution. Microsc. Microanal. Microstruct. ' FEBRUARY 1996, PAGE 17 Classification Physics Abstracts 61.16Bg -68.55Nq -74.76Bz -81.15Cd
doi:10.1051/mmm:1996104 fatcat:pg5ilpzr6zhv3bayhf34ccch7e