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2014 The microstructure of (001) YBa2CU3O7-03B4 and YBa2Cu3-xMxO7-03B4 (M = Zn or Fe) thin films grown by inverted cylindrical magnetron sputtering was investigated by means of electron microscopy. The imperfections present in the films are discussed. Special attention is paid to nanoscale Y2O3 inclusions. The density of  Y2O3 precipitates was studied in YBa2CU3-xZnxO7-03B4 and YBa2Cu3-xFexO7-03B4 thin films prepared under identical conditions. The density decreases for increasingdoi:10.1051/mmm:1996104 fatcat:pg5ilpzr6zhv3bayhf34ccch7e