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1998 Solid-State, Actuators, and Microsystems Workshop Technical Digest
We have developed a new surface-micromachining process for realizing three-dimensional MEMS devices from hinged planar structures. Magnetic actuation, which is provided by Permalloy material attached to hinged plates, provides efficient and high yield out-of-plane actuation. Parallel actuation of large arrays of hinged microstructures is achieved under a globally applied external magnetic field. The magnitude of the actuation can be controlled by either the volume of the magnetic piece or thedoi:10.31438/trf.hh1998.61 fatcat:p3sud5ivurfutmqqlsu3q77bya