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To verify the effectiveness of a higher order electromechanical sigma-delta modulator ( M), a micromachined accelerometer is fabricated. The in-plane sensor with fully differential structure has a mechanical noise floor below 1 µg Hz −1/2 , static sensitivity 16 pF g −1 and resonant frequency 325 Hz. FEM analyses are performed to verify these key parameters. The silicon-on-glass sensor is fabricated by deep reactive ion etching (DRIE) and anodic bonding. Compared with a second-orderdoi:10.1088/0960-1317/15/7/004 fatcat:nz4bcgo7yjbrfbrrgnxpbu5ota