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Deposition of crystalline thin films of polytetrafluoroethylene ͑PTFE͒ was carried out on Si͑100͒ substrates by synchrotron irradiation of a PTFE target in vacuo. In situ mass spectrometric analysis of gaseous species evolved during the irradiation shows that, different from the laser ablation of PTFE for the deposition, the SR-induced reactions should be ablative photochemical decomposition ͑APD͒ rather than photothermal unzipping decomposition, yielding saturated fluorocarbons rather thandoi:10.1063/1.116526 fatcat:syi7i6df5ncuhblcsel5wohyla