Solar cells should have shortened life time in order to achieve effect circulation of renewable energy. In the semiconductor manufacturing operations, plasma process such as CVD, etching dominates large value of energy consumption. Reducing energy consumption of plasma processing is urged. With using switching power amplifier as a replacement of linear amplifier, significant energy reduction can be done. However, switching power amplifier has a drawback of destruction of switching device due to

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... high transient switch voltage during practical operation. In this paper, a voltage clamp circuit consists of diode and transformer is proposed. This circuit reduces the transient peak switch voltage of the class E amplifier. With adjusting winding ratio of transformers, clamp voltage can be arbitrary value. Namely, the diodes can be inactivated in ordinary variations of load impedance. But, it activates in sudden and significant change of load impedance. Simulation results showed that the proposed diode clamp circuit successfully reduces the transient peak switch voltage.