Fabrication, packaging, and performance of VCSELs and photodetectors for space applications

Ronald D. Briggs, Marcelino G. Armendariz, Kent M. Geib, Kent D. Choquette, D. K. Serkland, Kent D. Choquette, Chun Lei
1999 Vertical-Cavity Surface-Emitting Lasers III  
Optocouplers are used for a variety of applications aboard spacecraft including electrical isolation, switching and power transfer. Commercially available light emitting diode (LED)-based optocouplers have experienced severe degradation of light output due to extensive displacement damage occurring in the semiconductor lattice caused by energetic proton bombardment. A new optocoupler has been designed and fabricated which utilizes vertical cavity surface emitting laser (VCSEL) and resonant
more » ... y photodetector (RCPD) technologies for the optocoupler emitter and detector, respectively. Linear arrays of selectively oxidized GaAs/AIGaAs VCSELS and RCPDS, each designed to operate at a wavelength of 850nm, were fabricated using an airbridge contacting scheme. The airbridged contacts were designed to improve packaging yields and device reliability by eliminating the use of a polyimide planarizing layer which provided poor adhesion to the bond pad metallization. Details of the airbridged optocoupler fabrication process are reported. Discrete VCSEL and RCPD deviceswerecharacterized at temperatures between -1OV' C to 10W' C. Devices werepackaged in a face-to-face configuration to forma single channel optocoupler and its performance was evaluated under conditions of high-energy proton bombardment.
doi:10.1117/12.347105 fatcat:7mdjnmstybfx7navtprs4zleaa