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Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation
Journal of microelectromechanical systems
In thermomechanical data writing, a resistively-heated atomic force microscope (AFM) cantilever tip forms indentations in a thin polymer film. The same cantilever operates as a thermal proximity sensor to detect the presence of previously written data bits. This paper uses recent progress in thermal analysis of the writing and reading modes to develop new cantilever designs for increased speed, sensitivity, and reduced power consumption in both writing and reading operation. Measurements ofdoi:10.1109/jmems.2002.803283 fatcat:whi63ogacrfi7ihuc3auibjdam