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A HIGH ON/OFF RATIO MEMS CAPACITIVE SWITCH WITH APPLICATIONS IN SOLAR ENERGY HARVESTING
2012
2012 Solid-State, Actuators, and Microsystems Workshop Technical Digest
unpublished
In this paper, a novel electrostatic switch is reported that exhibits an ON/OFF capacitance ratio of 72, an ON capacitance value of 90 pF, and a pull-in voltage of less than 5 V within an area of 750 × 750 µm 2 . These characteristics are achieved by utilizing a slit-shape middle metal layer in-between the top and bottom metal plates. This design makes the capacitance ratio and the ON state capacitance tolerant against fabrication and temperature induced residual stress in the suspended metal
doi:10.31438/trf.hh2012.103
fatcat:vqpht7nzwfejfj4mzzcnizmg4y