A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2017; you can also visit the original URL.
The file type is
A self-consistent mathematic model for radio frequency (RF) glow discharge was proposed to investigate the spatiotemporal evolvement of collision-less plasma sheaths at different plasma characteristics, in which the influences of ion motion by instantaneous sheath electric field were considered and the present model would be suitable for describing the spatiotemporal characteristics plasma sheaths with wide RF-frequency ranges. The instantaneous relationship between the voltage on the RFbiasdoi:10.1016/j.phpro.2012.03.659 fatcat:kayhybimwjb4fexa3ydv2nqgwe