Field emission characteristics of multiwalled carbon nanotubes grown at low temperatures using electron cyclotron resonance chemical vapor deposition

Yun Sung Woo, Duk Young Jeon, In Taek Han, Young Jun Park, Ha Jin Kim, Jae Eun Jung, Jong Min Kim, Nae Sung Lee
2003 Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena  
Vertically aligned multiwalled carbon nanotubes were synthesized by electron cyclotron resonance chemical vapor deposition on Ni-coated glass substrates at temperatures as low as 400°C. Negative self-biases were induced to the substrates by radio frequency plasma to give ion bombardment to the growing surface. An increase of self-bias voltages from Ϫ50 to Ϫ200 V resulted in an evolution of the microstructures from amorphous carbon to nanorods, subsequently to nanotubes. Nanotubes grown above
more » ... ubes grown above Ϫ150 V were more straight in morphology and better in crystallinity than nanorods grown at Ϫ100 V. In the field emission ͑FE͒ measurements, the electric fields to obtain 1 A/cm 2 were 4.6 and 11.1 V/m for the nanorods and nanotubes grown at Ϫ100 and Ϫ200 V, respectively. The emission areas, calculated from the Fowler-Nordheim plots, were much larger in the nanorods than the nanotubes. It is considered that a larger amount of crystalline defects in nanorods plays a major role in improving their FE characteristics.
doi:10.1116/1.1580116 fatcat:yx7563qi5jfbjhdrfpzzfxto4m