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We have built a measurement system with superconducting sensors based on the Josephson effect. The Josephson junctions are incorporated on a cantilever to enable 3D near field scans of the radiated power distribution and topography scans at frequencies ranging from a few GHz up to the THz-regime.doi:10.1515/freq.2008.62.5-6.149 fatcat:3rd5xumxineotfx6xxvfb3qjoy