A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL.
The file type is
Microsystems are devices and small machines based on microtechniques which combine mechanical, chemical, physical or electronic functions. Microsystems are usually produced using mass production techniques originated from silicon technology. Alternatives are hereby offered by electrical discharge machining (EDM). Since considerable deficits in terms of technological developments exist in the field of micro-EDM, this paper sets out to investigate the application of micro-WEDM to the productiondoi:10.2526/ijem.4.41 fatcat:r2iuojhuo5g63iaadkjzpw3y4u