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Field evaporation of micro-clusters in a NiqMo alloy was studied. When field evaporation was carried out in vacuum, sporadic field evaporation of the surface atoms was frequently observed and the atom-probe analysis resulted in the higher Mo concentration for micro-clusters. We have found that this apparently erroneous composition was caused by simultaneous arrival of more thanone ion ofthe same isotope species at the detector. The appropriate experimental conditions to obtaindoi:10.1051/jphyscol:1987652 fatcat:5nnq6uldwjcbrasuql43pnzgl4