Optimization of the gain-bandwidth product of capacitive micromachined ultrasonic transducers

S. Olcum, M.N. Senlik, A. Atalar
2005 IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control  
Capacitive micromachined ultrasonic transducers (cMUT) have large bandwidths, but they typically have low conversion efficiencies. This paper defines a performance measure in the form of a gain-bandwidth product and investigates the conditions in which this performance measure is maximized. A Mason model corrected with finite-element simulations is used for the purpose of optimizing parameters. There are different performance measures for transducers operating in transmit, receive, or
more » ... modes. Basic parameters of the transducer are optimized for those operating modes. Optimized values for a cMUT with silicon nitride membrane and immersed in water are given. The effect of including an electrical matching network is considered. In particular, the effect of a shunt inductor in the gain-bandwidth product is investigated. Design tools are introduced, which are used to determine optimal dimensions of cMUTs with the specified frequency or gain response.
doi:10.1109/tuffc.2005.1563264 fatcat:hkvpdbalj5etjj5dw75yarwsbu