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Pull-In Voltage of Fixed-Fixed End Type MEMS Switches with Variative Electrostatic Area
2006
Sensors & Transducers Magazine (S&T e-Digest)
unpublished
In this paper we developed a new approach to calculation of pull-in voltage of fixed-fixed end type MEMS switches. In the previous works Pull-in voltage has been calculated on a lumped model, when one of them used a distributed model by assuming the electrostatic area is applied the whole of the surface of the beam. In the present work, we used a distributed model to determinate the pull-in voltage. To do this the nonlinear governing equation of the beam with non-uniform electrostatic pressure
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