Pull-In Voltage of Fixed-Fixed End Type MEMS Switches with Variative Electrostatic Area

Hamed Sadeghian, Ghader Rezazadeh, Ehsan Malekpour, Ayla Shafipour
2006 Sensors & Transducers Magazine (S&T e-Digest)   unpublished
In this paper we developed a new approach to calculation of pull-in voltage of fixed-fixed end type MEMS switches. In the previous works Pull-in voltage has been calculated on a lumped model, when one of them used a distributed model by assuming the electrostatic area is applied the whole of the surface of the beam. In the present work, we used a distributed model to determinate the pull-in voltage. To do this the nonlinear governing equation of the beam with non-uniform electrostatic pressure
more » ... hat applied in the part of beam has been derived. The derived nonlinear equation has been solved numerically and has been showed that the results of our approach are more accurate than the other previous works.
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