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Although S-I-S (superconductor-insulator-superconductor) multilayered structure is expected to increase the maximum acceleration gradient of SRF cavities, in order for it to function in reality, it is necessary to develop a coating processing that can realize high purity and quality superconducting thin-films. We launched the co-sputtering system to create superconducting alloy thin-films such as Nb3Sn and to research how the characteristics of them change depending on the coating conditions.doi:10.18429/jacow-linac2018-tupo050 fatcat:5sb7ojzpyjhv3mxvpzukuhknlu