Although S-I-S (superconductor-insulator-superconductor) multilayered structure is expected to increase the maximum acceleration gradient of SRF cavities, in order for it to function in reality, it is necessary to develop a coating processing that can realize high purity and quality superconducting thin-films. We launched the co-sputtering system to create superconducting alloy thin-films such as Nb3Sn and to research how the characteristics of them change depending on the coating conditions.

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... e deposition rate of two elements was optimized by adjusting each input power, so we successfully obtained an alloy thin-film having appropriate composition ratio. In addition, we developed another experimental equipment for coating on the inner surface of the 3GHz TESLA type small cavities. A cylindrical shape Nb in which some permanent magnets are inserted was adopted as the sputtering target. Glow discharge of the target was confirmed, and the inner-sputtering test was conducted. This presentation reports the specifications of the two sputtering apparatuses and the results of the coating test.