Construction of Thin-film Coating System Toward the Realization of Superconducting Multilayered Structure

Ryohei Ito, Hitoshi Hayano, Hayato Ito, Yoshihisa Iwashita, Ryo Katayama, Takayuki Kubo, Tomohiro Nagata, Hiroki Oikawa, Takayuki Saeki, Schaa, Volker RW (Ed.), Pei, Guoxi (Ed.), Chin, Yong Ho (Ed.) (+2 others)
Although S-I-S (superconductor-insulator-superconductor) multilayered structure is expected to increase the maximum acceleration gradient of SRF cavities, in order for it to function in reality, it is necessary to develop a coating processing that can realize high purity and quality superconducting thin-films. We launched the co-sputtering system to create superconducting alloy thin-films such as Nb3Sn and to research how the characteristics of them change depending on the coating conditions.
more » ... e deposition rate of two elements was optimized by adjusting each input power, so we successfully obtained an alloy thin-film having appropriate composition ratio. In addition, we developed another experimental equipment for coating on the inner surface of the 3GHz TESLA type small cavities. A cylindrical shape Nb in which some permanent magnets are inserted was adopted as the sputtering target. Glow discharge of the target was confirmed, and the inner-sputtering test was conducted. This presentation reports the specifications of the two sputtering apparatuses and the results of the coating test.
doi:10.18429/jacow-linac2018-tupo050 fatcat:5sb7ojzpyjhv3mxvpzukuhknlu