Local spatial and temporal control of laser-induced microplasma (LIMP) allows to form a microrelief on fused silica plates for the fabrication of multilevel phase elements. In this work we suggested the optimal way for precision depth variation (up to 50 nm) of the microrelief (0.05 -15 μm) on fused silica surface. New software and hardware were developed for the automation of optical phase elements calculation and its fabrication by LIMP. A few types of multilevel random phase plates were

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... imentally realized. The fabricated elements were successfully tested in the optical scheme for the correction of the highly coherent laser beam. The comparative analysis of binary and discrete phase plates was accomplished.