Traditional radio frequency filters cannot meet the demands of miniaturization, high frequency operation, integration, and broadband capacity in new-generation communication system owing to their larger volumes. A thin film bulk acoustic resonator (FBAR) is therefore suggested as an optimum solution because of its small volume and a good performance. In this study, the COMSOL multiphysics software was used to build 2 D and 3 D finite element models to analyze the harmonic characteristics of the

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... FBAR. Based on the optimized structural parameters, the FBAR was fabricated with series resonant frequency, parallel resonant frequency, and effective coupling coefficient values of 3.705, and 3.82 GHz, and 7.4%, respectively. Compared with the simulated FBAR results, the effective coupling coefficient of the fabricated FBAR declined by only 0.1%, almost achieving the desired performance.