An error indicator and automatic adaptive meshing for electrostatic boundary element simulations

M. Bachtold, M. Emmenegger, J.G. Korvink, H. Baltes
1997 IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems  
Accurate electrostatic simulations are required in the areas of MEMS and VLSI interconnects. Typical simulations involve complex geometries and various boundary conditions. The boundary element method (BEM) is well suited to such computations. For highly accurate solutions the meshing of the geometry becomes increasingly important. A scheme is presented which allows generating a good mesh automatically. An error indicator based on boundary integral equations (BIE) monitors the simulation
more » ... e simulation accuracy in each boundary element. Mesh refinement is applied to areas which contribute strongly to the overall error. The generated, refined meshes lead to significantly higher accuracy for a given computational effort.
doi:10.1109/43.664226 fatcat:3fgj4ufyl5bcva4guqhgu52mnu