Formation of artificial BaTiO3/SrTiO3superlattices using pulsed laser deposition and their dielectric properties

Hitoshi Tabata, Hidekazu Tanaka, Tomoji Kawai
1994 Applied Physics Letters  
Epitaxial waveguide structures of c-axis oriented BaTiO 3 thin films on MgO͑001͒ have been grown by pulsed laser deposition. The structural properties of the samples have been characterized by Rutherford backscattering spectrometry/ion channeling ͑RBS/C͒, x-ray diffraction, and atomic force microscopy. We found excellent crystalline quality even up to thicknesses of a few microns. This has been confirmed by RBS/C minimum yield values of 2%-3%, a full width at half maximum of 0.36°of the BaTiO 3
more » ... ͑002͒ rocking curve, and a rms roughness of 1.1 nm for a 950 nm BaTiO 3 film. The out-of-plane refractive index was measured to be close to the extraordinary bulk value with the birefringence being about one third of the bulk value. Waveguide losses of 2.9 dB/cm have been demonstrated.
doi:10.1063/1.112837 fatcat:ny6ge7kltrebngpnpbcf2fg6zi