Portable x-ray fluorescence spectrometer for coating thickness measurement

Alain Carapelle, Karl Fleury-Frenette, Jean-Paul Collette, Henri-Pierre Garnir, Philippe Harlet
2007 Review of Scientific Instruments  
A handheld x-ray spectrometer has been realized and tested. The purpose of the device is to measure the thickness of coated samples in the range of 1 -1500 nm in an industrial environment. Accuracy of ϳ3% has been achieved in this range with a measurement time of 1 min. Automated software has been implemented to allow utilization by a nonspecialist operator. An automated calibration procedure, based on measurements of reference samples, is used.
doi:10.1063/1.2822613 pmid:18163722 fatcat:gpgodn2nx5cyrpd3qyqq43rbpy