Electron spin resonance of separation by implanted oxygen oxides: Evidence for structural change and a deep electron trap

J. F. Conley, P. M. Lenahan, P. Roitman
1992 Applied Physics Letters  
We present direct evidence for deep electron traps and structural changes in separation by implanted oxygen (SIMOX) buried oxides and evidence that some positively charged E' centers are compensated by negatively charged centers in SIMOX oxides.
doi:10.1063/1.106809 fatcat:zzrrfuf6jnfmnn27l5ocwen7ka