Low-cost direct writing lithography system for the sub-micron range

Holger Becker, Reinhard Caspary, Christian Toepfer, Manfred V. Schickfus, Siegfried Hunklinger
1997 Journal of Modern Optics  
We have developed a fixed beam direct writing laser lithography system with a resolution of 400 nm at 457 nm wavelength and a writing speed of 4.2 mm/s with total system costs of less than 100 000 US$.
doi:10.1080/095003497153077 fatcat:en3hp6ahqnadzg4n5pjze7hqcm