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We have developed a fixed beam direct writing laser lithography system with a resolution of 400 nm at 457 nm wavelength and a writing speed of 4.2 mm/s with total system costs of less than 100 000 US$.
Holger Becker, Reinhard Caspary, Christian Toepfer, Manfred V. Schickfus, Siegfried Hunklinger. "Low-cost direct writing lithography system for the sub-micron range." Journal of Modern Optics (1997) 1715-1723