Parallel simulation-based optimization on scheduling of a semiconductor manufacturing system

Yumin Ma, Fei Qiao, Wei Yu, Jianfeng Lu
2014 Proceedings of the Winter Simulation Conference 2014  
As an important and challenging problem, the scheduling of semiconductor manufacturing is a hot topic in both engineering and academic fields. Its purpose is to satisfy production constraints on both production process and resources, as well as optimizing some performance indexes like cycle-time, movement, etc. However, due to its complexities, it is hard to describe the scheduling process with a mathematical model, or to use conventional methods to optimize its scheduling problem. A Simulation
more » ... approach is proposed to optimize the scheduling of a semiconductor manufacturing system, i.e. a simulation-based optimization (SBO) approach. Because the high computational cost of SBO approach could hinder its application in the real production line, a parallel/distributed architecture is discussed to improve its efficiency. Using genetic algorithm (GA) as an optimization algorithm, the proposed parallel-SBO based scheduling approach for semiconductor manufacturing system is tested for its feasibility and effectiveness.
doi:10.1109/wsc.2014.7020101 dblp:conf/wsc/MaQYL14 fatcat:mxpqmxgm3jgdxb37o6dphidkxe