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Parallel simulation-based optimization on scheduling of a semiconductor manufacturing system
2014
Proceedings of the Winter Simulation Conference 2014
As an important and challenging problem, the scheduling of semiconductor manufacturing is a hot topic in both engineering and academic fields. Its purpose is to satisfy production constraints on both production process and resources, as well as optimizing some performance indexes like cycle-time, movement, etc. However, due to its complexities, it is hard to describe the scheduling process with a mathematical model, or to use conventional methods to optimize its scheduling problem. A Simulation
doi:10.1109/wsc.2014.7020101
dblp:conf/wsc/MaQYL14
fatcat:mxpqmxgm3jgdxb37o6dphidkxe