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On-chip microfluidic tuning of an optical microring resonator
2006
Applied Physics Letters
We demonstrate the switching of a silicon nitride micro ring resonator (MRR) by using digital microfluidics (DMF). Our platform allows driving micro-droplets on-chip, providing control over the effective refractive index at the vicinity of the resonator and thus facilitating the manipulation of the transmission spectrum of the MRR. The device is fabricated using a process that is compatible with high-throughput silicon fabrication techniques with buried highly doped silicon electrodes. This
doi:10.1063/1.2182111
fatcat:3cbleusjbfa2dmhmuyu5mwbpke